Linear Piezo Stages (XLS Series)

Xeryon offers a range of precision linear stages in different lengths and with many additional options. With travel ranges up to 100 mm, the number of possible applications is endless. Thanks to the patented Crossfixx™ ultrasonic piezo technology, travel velocities of 200 mm/s can be reached, making Xeryon precision linear stages the fastest precision stages on the market. Xeryon linear stages are perfectly fit for scanning setups, providing constant scanning speed with a speed stability of less than 2%.

All of our stages are easy to install and intuitive to use. Connect the stage to the controller and move to the desired position by using our software or by guiding with our separate manual controls.

Xeryon offers different levels of precision, from a resolution of 1.25 µm, up to a resolution of 1 nm. For each model, additional options are available – for example, high vacuum compatibility, making the stage the perfect solution for your SEM or your vacuum chamber. With the optional extra small cage, we can get even more travel distance from our stages, driving the volume-to-stroke ratio to the limit.

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