NanoTube N3
Description
The Excillum NanoTube N3 is based on advanced electron optics and the latest tungsten-diamond transmission target technology. Automatic e-beam focusing and astigmatism correction ensures that the smal
Specification
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| NanoTube N3 60kV | |||
| Technical specifications | |||
| Voltage | 40-60 kV | Max. power on target | 2.4 W |
| High brightness emitter | LaB6 | Target material | Tungsten (W) on diamond |
| Min. resolution | 150 nm | Target type | Transmission |
| Min. focus-object distance | 150 µm | Long term spot stability | < 100 nm1 |
1) Standard deviation over >8 hours when operating at fix settings after >30 minutes thermal settling.
| NanoTube N3 110 kV | |||
| Technical specifications | |||
| Voltage | 40-110 kV | Max. power on target | 6.1 W |
| High brightness emitter | LaB6 | Target material | Tungsten (W) on diamond |
| Min. resolution | 150 nm | Target type | Transmission |
| Min. focus-object distance | 150 µm | Long term spot stability | < 100 nm1 |
1) Standard deviation over >8 hours when operating at fix settings after >30 minutes thermal settling.
| NanoTube N3 160 kV | |||
| Technical specifications | |||
| Voltage | 40-160 kV | Max. power on target | 11 W |
| High brightness emitter | LaB6 | Target material | Tungsten (W) on diamond |
| Min. resolution | 150 nm | Target type | Transmission |
| Min. focus-object distance | 150 µm | Long term spot stability | < 100 nm1 |
1) Standard deviation over >8 hours when operating at fix settings after >30 minutes thermal settling.